Model
|
AOS-3S
|
AOS-3SL
|
Spectral range
|
370
... 1175 nm
|
Spectral
bandwidth
|
0.3
nm (404.7 nm)
0.5 nm (632.8 nm)
0.8 nm (1014.0 nm)
|
Wavelength
accuracy
|
±0.4
nm (370 ... 720 nm)
± 1 nm (720 ... 1175 nm)
|
Number of
spectral points
|
2
... 201
|
2
... 255
|
Minimal
spectral point measurement time
|
5
ms
|
Typical
spectral point measurement time
|
40
ms
|
Photometric
accuracy:
reflectance (R in %)
transmittance (T in %)
|
±(0.2
+ 0.02R)% (400 ... 720 nm)
±(0.05 + 0.02R)% (720 ... 1100 nm)
±(0.2 + 0.01T)% (400 ... 720 nm)
±(0.05 + 0.01T)% (720 ... 1100 nm)
|
±(0.1
+ 0.02R)% (400 ... 720 nm)
±(0.01 + 0.02R)% (720 ... 1100 nm)
±(0.1 + 0.01T)% (400 ... 720 nm)
±(0.01 + 0.01T)% (720 ... 1100 nm)
|
Features
|
| Monitoring
of non-quaterwavelength multilayer deposition
|
| Theoretical
simulation of deposition process
|
|
| Transmission
measurement for 0 ... 45° angles
|
| Spectral
measurements for different polarizations
|
| Small
influence (no more than 0.01%) of backside reflection from
unpolished surface of measured sample
|
|
Power supply
|
220V,
50/60 Hz, 250VA
|
Weight
optical unit
control unit
|
2.5 kg
12 kg
|
10 kg
12 kg
|